Conformal oxide coating of carbon nanotubes

Kawasaki, S. and Catalan, G. and Fan, H. J. and Saad, M. M. and Gregg, J. M. and Correa-Duarte, M. A. and Rybczynski, J. and Morrison, F. D. and Tatsuta, T. and Tsuji, O. and Scott, J. F. (2008) Conformal oxide coating of carbon nanotubes. Applied Physics Letters, 92 (5). 053109-3. DOI 10.1063/1.2841710

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Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. © 2008 American Institute of Physics.

Item Type: Article
Additional Information: Samco, cml
Uncontrolled Keywords: 2007 AREP IA55 2008 P
Subjects: 03 - Mineral Sciences
Divisions: 03 - Mineral Sciences
Journal or Publication Title: Applied Physics Letters
Volume: 92
Page Range: 053109-3
Identification Number: 10.1063/1.2841710
Depositing User: Sarah Humbert
Date Deposited: 16 Feb 2009 13:02
Last Modified: 23 Jul 2013 10:07
URI: http://eprints.esc.cam.ac.uk/id/eprint/445

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