Solution-process coating of vertical ZnO nanowires with ferroelectrics

Kawasaki, S. and Fan, H. J. and Catalan, G. and Morrison, F. D. and Tatsuta, T. and Tsuji, O. and Scott, J. F. (2008) Solution-process coating of vertical ZnO nanowires with ferroelectrics. Nanotechnology, 19. p. 375302. ISSN 0957-4484 DOI

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We have developed a modified misted deposition process by combining substrate and mist heating for the deposition of ferroelectrics on 3D nanostructures. Arrays of vertical ZnO nanowires, sputter coated with Pd bottom electrodes, are used as the substrate. Scanning electron microscopy investigations show that conformal coating of ferroelectric Pb(Zr, Ti)O3 (PZT) with good step coverage is obtained at deposition temperatures above 140 ◦C. The substrate heating also eliminates the common ‘bundling’ problem of the nanowire arrays. On the basis of data on x-ray diffraction, energy dispersive x-ray spectroscopy, and P–E hysteresis of PZT films on flat substrates, we obtain the optimum substrate temperature window to be 180–220 ◦C, in terms of best step coverage and an evident ferroelectricity. This is a significant step towards the end-goal of fully integrated ZnO nanowires with ferroelectric capacitors, which may be useful for the light-emitting applications of ZnO.

Item Type: Article
Additional Information: Samco, cml
Uncontrolled Keywords: 08AREP IA57 2008 P
Subjects: 03 - Mineral Sciences
Divisions: 03 - Mineral Sciences
Journal or Publication Title: Nanotechnology
Volume: 19
Page Range: p. 375302
Identification Number:
Depositing User: Sarah Humbert
Date Deposited: 16 Feb 2009 13:02
Last Modified: 23 Jul 2013 10:07

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